Image
Code
ELL2
Model
FS-RT300 / FS-8 (GEN4)
Location
Soft Materials Lab - B606
Primary Training Contact
Helpful Links
Film Sense Website: https://film-sense.com/film-sense-multi-wavelength-ellipsometer/?
The FS-RT300 combines an FS-8 Multi-Wavelength Ellipsometer with a compact automated mapping stage to provide fast, accurate, and reliable film thickness uniformity measurements acorss a wafer.
Applications
- Ex-situ thin film characterization:
- Thickness
- Refraction Index (n)
- Extinction Coefficient (k)
Features
- No moving parts in the ellipsometric detector
- Automated mapping stage
- Excellent thickness precision, better than 0.0004 nm for many samples (for a 1 second acquisition), even for sub-monolayer film thickness
- Integrated computer for instrument control and data analysis, with a web browser interface accessible from any modern computer, laptop, or tablet
Specifications
- 8 wavelengths of ellipsometric data (370, 450, 525, 595, 660, 735, 850, 950 nm) with LED sources
- Accurate thickness measurements for most transparent thin films from 0 – 5 µm
- Typical time for wafer map: 2.5 minutes (49 points on a 300 mm diameter wafer)
- Typical thickness repeatability: 0.002 nm
- Integrating focusing probes, standard spot size: 0.8 x 1.9 mm (other spot sizes available)
- Stage travel: R (linear), 150 mm, resolution: 12 µm Theta (rotation) 360°, resolution: 0.05°
- Motorized Z-stage for sample auto alignment
- Contour and 3D plots of measured parameters