SMIF Supplied Chemicals
SMIF supplies most of the “standard” chemicals that are used in the facility. These chemicals are available to all certified users, and their use in covered in the usage fees. We ask that you do not bring in your own bottles of these chemicals.
Other Approved Chemicals
Chemicals in this list have been authorized for usage within SMIF, but are not supplied by the SMIF facility. Authorization is not needed to bring these chemicals into the facility, but we ask that you contact SMIF before using them to ensure available storage and verify proper use and disposal.
Any chemical that is not on the approved chemical list must first be authorized by SMIF before it can be brought into the facility. To bring a new chemical into the facility you must:
- Contact SMIF, and obtain approval before ordering the chemical
- Supply SMIF with an MSDS / SDS for the chemical from the manufacturer
- Ensure that the chemical is labeled properly:
- Name of chemical as it appears on MSDS / SDS
- Physical and health hazards of the chemical
- Your name and date
- Contact SMIF to verify proper storage, use, and disposal of the chemical
SMIF Supplied Chemicals
Item |
Description |
CAS Number |
Location |
Particularly Hazardous? |
SOP |
1165 Resist Remover (NMP) | Microposit Remover 1165 Resist Remover (NMP) To be used in solvent hoods!!! |
Solvent Cabinet | Yes | SOP | |
Acetic Acid | Glacial Acetic Acid
Liquid, 500mL |
64-19-7 |
Solvent Cabinet |
SOP | |
Acetone | Acetone Liquid, 4L bottle |
67-64-1 | Solvent Cabinets, squirt bottles | SOP | |
Ammonium Hydroxide | Ammonium Hydroxide (NH4OH) Liquid, 4L bottle |
1336-21-6 | Oxidizer Cabinet | SOP | |
Araldite GY 502 | Araldite GY 502 | Acid Cabinet, Prep Lab | SOP | ||
(BDMA) N-Benzyldimethylamine | (BDMA) N-Benzyldimethylamine | 103-83-3 | Acid Cabinet, Prep Lab | SOP | |
BOE | Buffered Oxide Etch 10:1 Liquid, 4L bottle |
Acid Cabinet | Yes | SOP | |
DDSA | Dodecenyl Succinic Anhydride Liquid, 450mL |
Acid Cabinet, Prep Lab | SOP | ||
D.E.R. 736 EPOXY RESIN | D.E.R. 736 EPOXY RESIN | Acid Cabinet, Prep Lab | SOP | ||
DMAE Dimethylaminoethanol | DMAE Dimethylaminoethanol | 108-01-0 | Acid Cabinet, Prep Lab | SOP | |
DMP-30 | Ancamine K54 Curing Agent Liquid, 50mL |
Acid Cabinet, Prep Lab | SOP | ||
Embed 812 | Embed 812 Epon resin Liquid, 450mL |
25068-38-6 | Acid Cabinet, Prep Lab | SOP | |
ERL 4221 | ERL 4221 | Acid Cabinet, Prep Lab | SOP | ||
Ethanol | Denatured Ethanol
Liquid, 1pt |
64-17-5 |
Solvent Cabinet, Prep Lab |
SOP | |
Formaldehyde (20% aqueous) | 20% Paraformaldehyde (formaldehyde) solution Liquid, 10 - 10mL Vials |
30525-89-4 | Refrigerator, Chase | Yes | SOP |
Glutaraldehyde (25% aqueous) | Glutaraldehyde (25% aqueous) Liquid, 10 - 10mL Vials |
111-30-8 | Refrigerator, Chase | Yes | SOP |
Gold Etchant GE-8110 | Gold Etchant GE-8110 Appearance and odor: dark brown liquid with iodine vapor odor. Etch Rate ( 30 °C): 20Å/sec |
Acid cabinet | SOP | ||
Hydrochloric Acid | Hydrochloric Acid (HCl) Liquid, 4L bottle |
7647-01-0 | Acid Cabinet | SOP | |
Hydrofluoric Acid | Hydrofluoric Acid (HF) Liquid, 4L bottle |
7664-39-3 | Acid Cabinet | Yes - Acutely Toxic | SOP |
Hydrogen Peroxide | Hydrogen Peroxide (H2O2) Liquid, 4L vented bottle |
7722-84-1 | Oxidizer Cabinet | Yes - Acutely Toxic | SOP |
Iodine | LUGOL'S IODINE, CONCENTRATED, WEIGERT (USP STRONG IODINE SOLUTION) | 7553-56-2 | Vitrobot Hood, Prep Lab | SOP | |
Isopropyl Alcohol | Isopropyl Alcohol (IPA / 2-Propanol) Liquid, 4L bottle |
67-63-0 | Solvent Cabinet | SOP | |
Lead Citrate | Lead Citrate, Trihydrate Small crystals, 100g |
512-26-5 | N2 Box, Prep Lab | Yes | SOP |
Methanol | Methyl Alcohol Liquid, 4L bottle |
67-56-1 | Solvent Cabinet | SOP | |
MF-319 Developer | Microposit MF-319 Photoresist Developer Liquid, 1 gallon bottle |
Developer Cabinet, Photo Bay | SOP | ||
MIBK | Methyl Isobutyl Ketone | 108-10-1 | Solvent Cabinet | SOP | |
NFR016D2 | NFR016D2 negative resist |
Resist Cabinet, Photo Bay |
SOP | ||
Nitric Acid | Nitric Acid (HNO3) Liquid, 4L glass bottle |
7697-37-2 | Acid Cabinet | Yes | SOP |
NMA | Methyl-5-Norbornene-2,3-Dicarboxylic Anhydride Liquid, 450mL |
Acid Cabinet, Prep Lab | SOP | ||
NSA (Nonenyl Succinic Anhydride Modified) | NSA (Nonenyl Succinic Anhydride Modified) | Acid Cabinet, Prep Lab | SOP | ||
OsO4 (4% ) | Osmium Tetroxide (4%) Liquid, 10 - 10mL Vials |
20816-12-0 | Refrigerator, Chase | Yes - Acutely Toxic | SOP |
o-Xylene | o-Xylene | 95-47-6 |
Solvent Cabinet |
SOP | |
P20 Adhesion Promoter | Microprime Primer P20 Adhesion Promoter Liquid, 4L bottle |
Resist Cabinet, Photo Bay | SOP | ||
PBS, 10x | Phosphate Buffered Saline, 10x Liquid, 1L |
Refrigerator, Chase | Not Hazardous | None | |
PMMA (495) | PMMA (495) - polymethyl methacrylate Liquid, for e-beam lithography |
9011-14-7 | Resist Cabinet, Photo Bay | SOP | |
PMMA (950) | PMMA (950) - polymethyl methacrylate Liquid, for e-beam lithography |
9011-14-7 | Resist Cabinet, Photo Bay | SOP | |
Positive Resist S-1813 | Shipley Microposit S-1813 Positive Photoresist Liquid, 1 qt. bottle |
Resist Cabinet, Photo Bay | SOP | ||
Potassium Hydroxide | Potassium Hydroxide (KOH) Liquid, 4L bottle |
1310-58-3 | Oxidizer Cabinet | SOP | |
Propylene Oxide | Propylene Oxide Liquid, 500mL bottle |
75-56-9 | Solvent Cabinet, Prep Lab | Yes | SOP |
PTA | Phosphotungstic Acid Powder, 100g |
12501-23-4 | N2 Box, Prep Lab | SOP | |
Sodium Acetate | Sodium Acetate,Trihydrate GRANULAR SOLID, 500g |
127-09-3 | N2 Box, Prep Lab | SOP | |
Sodium Cacodylate | Sodium Cacodylate, Trihydrate Small Crystals, 500g |
124-65-2 | N2 Box, Prep Lab | Yes | SOP |
Sodium Hydroxide | Sodium Hydroxide Pellets, 500g |
1310-73-2 | Acid Cabinet, Prep Lab | SOP | |
SU-8 10 | SU-8 10 | Resist Cabinet, Photo Bay | SOP | ||
SU-8 Developer | SU-8 Developer |
|
Resist Cabinet, Photo Bay | SOP | |
Sulfuric Acid | Sulfuric Acid (H2SO4) Liquid, 4L bottle |
7664-93-9 | Acid Cabinet | Yes - Carcinogen | SOP |
TCE | Trichloroethylene (TCE) Liquid, 4L bottle |
79-01-06 | Solvent cabinet | Yes | SOP |
Uranyl Acetate | Uranyl Acetate Powder, 25g |
541-09-3 | N2 Box, Prep Lab | Yes | SOP |
Uranyl Formate | Uranyl Formate | 16984-59-1 | N2 Box, Prep Lab | SOP | |
ZEP520A E-beam resist | ZEP520A E-beam resist For e-beam lithography on EBL1 |
Resist Cabinet, Photo Bay | SOP |
Other Approved Chemicals
Item |
Description |
Location |
SOP |
1H,1H,2H,2H-perfluorodecyltriethoxysilane | 1H,1H,2H,2H-perfluorodecyltriethoxysilane | Solvent cabinet | SOP |
3-AMINOPROPYLTRIETHOXYSILANE |
APTES |
Solvent Cabinet | SOP |
3M Novec 72DE Engineered Fluid |
3M Novec 72DE Engineered Fluid |
Solvent Cabinet | SOP |
3-Phenylpropane-1-thiol |
3-Phenylpropane-1-thiol (CAS number 24734-68-7) |
Solvent cabinet | SOP |
3-(trimethoxysilyl)propyl acrylate | 3-(trimethoxysilyl)propyl acrylate | Solvent Cabinet | SOP |
Aculon A | Aculon A | Solvent Cabinet | SOP |
Aluminum Etch Type A | Aluminum Etch Type A | Acid Cabinet | SOP |
AZ10XT Photoresist | AZ10XT Photoresist | Resist Cabinet, Photo Bay | SOP |
AZ 327 Developer | AZ 327 MIF Developer Liquid, 1 gallon bottle |
Developer Cabinet, Photo Bay | SOP |
AZ 400K Developer | AZ 400K Photoresist Developer | Developer Cabinet, Photo Bay | SOP |
AZ 917 MIF Developer | AZ 917 MIF Developer | Developer Cabinet, Photo Bay | SOP |
AZ P4620 Photoresist | AZ P4620 Photoresist | Resist Cabinet, Photo Bay | SOP |
BCB | BCB / Cyclotene Liquid, various types of BCB |
Resist Cabinet, Photo Bay | SOP |
Buffer Solution, pH7 | Buffer Solution, pH7 | Solvent cabinet | SOP |
CD-26 | CD-26 | Resist Cabinet, Photo Bay | SOP |
Chromium Etchant Type 1020 | Chromium Etchant Type 1020 | Acid Cabinet | SOP |
Chromium Etchant 9057 | Chromium Etchant 9057 | Acid Cabinet | SOP |
Copper Etch APS-100 | Copper Etch APS-100 | Oxidizer Cabinet | SOP |
Copper Etchant 100/200 | Copper Etchant 100/200 | Acid cabinet | SOP |
CR-14 Chromium Etchant | CR-14 Chromium Etchant | Acid cabinet | SOP |
CR-7 Chromium Etchant | CR-7 Chromium Etchant | Acid cabinet | SOP |
Cytop | Cytop CTX-809A | Resist Cabinet, Photo Bay | SOP |
Cytop Solvent | Cytop CT-SOLV180 | Resist Cabinet, Photo Bay | SOP |
Darocur 1173 | Darocur 1173 | Solvent Cabinet | SOP |
Dimethyl Sulfoxide | Dimethyl Sulfoxide | Solvent Cabinet | SOP |
DisCharge H2Ox2 | DisCharge H2Ox2 | Solvent Cabinet | SOP |
Dynastrip DL9150 | Dynastrip DL9150 | Solvent Cabinet | SOP |
Formic Acid | Formaic Acid | Solvent Hood & Solvent Cabinet | SOP |
Gold Etchant Sigma Aldrich | Gold Etchant Sigma Aldrich | Acid Cabinet | SOP |
Gold Etchant TFA | Gold Etchant TFA | Acid Cabinet | SOP |
HEPES | HEPES | Not stored in SMIF | SOP |
Hexanes | Hexanes | Solvent Cabinet | SOP |
HMDS | Hexamethyldisilazane | Solvent Cabinet | SOP |
Iron Oxide Etchant 9028 | Iron Oxide Etchant 9028 | Acid Cabinet | SOP |
JSR JPD523AD-10MA | JSR JPD523AD-10MA | Developer Cabinet, Photo Bay | SOP |
JSR PFR IX420H | Photoresist | Resist Cabinet, Photo Bay | SOP |
JSR PFR IX965G | Photoresist | Resist Cabinet, Photo Bay | SOP |
Kapton Polyimide Etch | Kapton Polyimide Etch | Acid Cabinet | SOP |
LOR A Series Resist | LOR A Series Resist | Resist Cabinet, Photo Bay | SOP |
Lysine Acetate | Lysine Acetate | Vitrobot Hood | SOP |
Ma-D 553/s developer | Ma-D 553/s developer | Developer Cabinet, Photo Bay | SOP |
Ma-N 1400 negative tone photoresist series | Ma-N 1400 negative tone photoresist series | Resist Cabinet, Photo Bay | SOP |
Ma-N2403 Resist | Ma-N2403 Resist | Flammables Refrigerator, Photo Bay | SOP |
MIBK | Methyl Isobutyl Ketone | Solvent cabinet | SOP |
MF-24A developer | MF-24A developer | Developer Cabinet, Photo Bay | SOP |
NafionTM PFSA 5% Dispersions D520 | NafionTM PFSA 5% Dispersions D520 | Resist Cabinet, Photo Bay | SOP |
N,N-Dimethylformamide (DMF) | N,N-Dimethylformamide DMF |
Solvent cabinet | SOP |
NRR-001 Photoresist Stripper | NRR-001 Photoresist Stripper | Solvent Cabinet | SOP |
P(VDF-TrFE) | poly(vinylidene difluoride - trifluoroethylene) | Resist Cabinet, Photo Bay | SOP |
PA-400R Polyimide | PA-400R Polyimide | Resist Cabinet, Photo Bay | SOP |
PBS | PBS | Not stored in SMIF | None |
PD523AD Developer | PD 523AD Developer | Developer Cabinet, Photo Bay | SOP |
PDMS | Polydimethylsiloxane | Bio Bay | None |
PEGDA(250) | PEGDA(250) | Solvent cabinet | SOP |
PEGDA(700) | PEGDA(700) | Solvent cabinet | SOP |
Pentaerythritol tetrakis(3-mercaptopropionate) (PETMP) | Pentaerythritol tetrakis(3-mercaptopropionate) (PETMP) | N2 Box, Photo Bay | SOP |
Phenylmethanethiol (aka Benzyl mercaptan) |
Phenylmethanethiol (aka Benzyl mercaptan)(CAS number 100-53-8) |
Solvent cabinet | SOP |
Phosphoric Acid | Phosphoric Acid (H3PO4) Liquid |
Acid cabinet | SOP |
PKP II Photoresist | PKP II Photoresist | Resist Cabinet | SOP |
PKP Photoresist Developer | PKP Photoresist Developer | Solvent Cabinet, use Solvent or Spin Coat Hood | SOP |
PKP II Rinse (Butyl Acetate) | PKP II Rinse (Butyl Acetate) | Solvent Cabinet | SOP |
Poly(ethylene glycol) | Poly(ethylene glycol) | Solvent Cabinet | SOP |
Polyimide PI 2611 | Polyimide PI 2611 | Resist Cabinet, Photo Bay | SOP |
Polyurethane liquid | Polyurethane liquid | Solvent cabinet | SOP |
Polyvidone 25 | Polyvidone 25 | Solvent Cabinet | SOP |
Potassium Titanium Oxide Oxalate Dihydrate | Potassium Titanium Oxide Oxalate Dihydrate | Acid Cabinet, Prep Lab | SOP |
Ruthenium Red | Ruthenium Red | Vitrobot Hood | SOP |
Sodium Borohydride | Sodium Borohydride | Vitrobot Hood | SOP |
Sodium Chloride 1% | Sodium Chloride 1% |
Developer cabinet | SOP |
Sodium Dodecyl Sulfate | Sodium Dodecyl Sulfate Flammable |
Solvent cabinet | None |
Sodium Fluoride | Sodium Fluoride | Solvent Cabinet, Prep Lab | SOP |
Sodium Hydroxide 4% | Sodium Hydroxide 4% | Developer cabinet | SOP |
Spin-On-Glass (SOG) | Accuglass "T−12B"(312B,412B,512B) Spin-On-Glass | Resist Cabinet, Photo Bay | SOP |
SPR 200 photoresist | SPR 200 photoresist | Resist Cabinet, Photo Bay | SOP |
SPR-2012 | SPR-2012 | Resist Cabinet, Photo Bay | SOP |
SU-8 | SU-8 Photoresist Liquid, various types of SU-8 |
Resist Cabinet, Photo Bay | SOP |
SU-8 2000 Thinner | SU-8 2000 Thinner Resist Thinner | Resist Cabinet, Photo Bay | SOP |
Sulfo-SANPAH | Sulfo-SANPAH | Not Stored in SMIF | SOP |
Teflon AF | Teflon AF | Resist Cabinet, Photo Bay | SOP |
TEOS | Tetraethyl orthosilicate | Solvent Cabinet, Prep Lab | SOP |
Tetramethylsilane | Tetramethylsilane Very Flammable |
Flammable Rated Refrigerator | SOP |
Titanium Etchant TFT | Titanium Etchant TFT | Acid Cabinet | SOP |
TMAH | TMAH | Developer Cabinet | SOP |
Toluene | Toluene Liquid |
Solvent cabinet | SOP |
Transene Copper Etchant | Transene Copper Etchant | Acid Cabinet | SOP |
Trichloro(octadecyl)silane | Trichloro(octadecyl)silane | Solvent Cabinet | SOP |
Trichloro perfluoroctyl silane | Trichloro(1H,1H,2H,2H-perfluorooctyl)silane | Solvent Cabinet | SOP |
VM651 Adhesion Promoter | VM651 Adhesion Promoter | Resist Cabinet, Photo Bay | SOP |
VM652 Adhesion Promoter | VM652 Adhesion Promoter | Resist Cabinet, Photo Bay | SOP |
Xylenes | Xylenes | Solvent Cabinet | SOP |