Probe Station

Probe Station
Cascade EPS150 Triax
Primary Training Contact
Operating Procedures

The probe station consists of the following components:

  • Cascade MicroTech EPS150TRIAX Probe Station with light shield enclosure
  • Signatone S-302-4 Four Point Resistivity Probe Station
  • Keithley 2450 SourceMeter SMU
  • Agilent 4284A LCR Meter

The  Cascade MicroTech EPS150TRIAX Probe Station allows the user to probe small features and measure current, voltage, resistance, capacitance and conductance.  The current and voltage applied to the device can be "swept" through an operator determined range and the results can be viewed and saved in a graphical format.  Capacitance and conductance can be measured over a frequency range of  20Hz to 1MHz.

The Signatone four point resistivity probing system is used to make sheet resistance and resistivity measurements of substrates and thin films.  It interfaces with the Keithley 2450 to perform these measurements.

  •  I-V characterization
  • Low current measurements
  • C-V characterization (at multiple frequencies)
  • Resistance and conductance measurements
  • Sheet resistance and resistivity measurements of substrates and deposited films

Cascade EPS150TRIAX Probe Station

  • Vacuum chuck and magnetic base micropositioners
  • Micropositioner movement in x,y, and z
  • Trinocular 6.7x stereo zoom microscope with 100x magnification

Signatone S-302-4 Four Point Resistivity Probe Station

  • 100mm probe stand with probe head quick mounting block
  • 4 point probe head with 5mil radius tips of 40mil spacing

Keithley 2450 Source Measure Unit

  • Keithley KickStart PC software for easy measurements and data export
  • Export data as Excel or ASCII formats and plots as image files
  • Sense using 2-wire or 4-wire configurations


Agilent 4284A LCR Meter

  • 20Hz to 1MHz with over 8,600 test frequencies
  • 0.05% basic accuracy, 6 digit resolution
  • Constant V or I test signal level
  • SMU Voltage measurement range: 10nV - 200V
  • SMU Voltage measurement resolution: 10nV on 20mV range, 5mV on 200V range
  • SMU Current measurement range: 10fA - 1A
  • SMU Current measurement resolution: 10fA on 10nA range, 1uA on 1A range