3D Optical/Laser Confocal Profiler

Image
KEY1
Code
KEY1
Model
VK-X3050
Location
Cleanroom
Primary Training Contact
Operating Procedures

The VK-X3000 3D Surface Profiler uses a triple scan approach, where laser confocal scanning, focus variation, and white light interferometry measurement methods are used, so that high-accuracy measurement and analysis can be performed on any target. The VK-X3000 has a resolution of 0.01 nm and can scan areas up to 50 x 50 mm (1.97" x 1.97"), allowing for measurement of the overall shape of the target while still maintaining high-resolution for analysis of minute surface features. KEYENCE's new 3D Surface Profiler can handle any target, including those with transparent or mirrored surfaces, large height changes, or steep angles.

Applications

3D surface profiling via optical, focus variation, laser confocal and while light interferometry

Features

Installed objectives: 5x (with ring light), 10x(with ring light), 20x, 50x and a 10x white light interferometry objective

Specifications

Laser Confocal

  • Height display resolution: 1nm
  • Height repeatability: 10x: 100nm; 20x: 40nm; 50x: 20nm
  • Width display resolution: 1nm
  • Width repeatability: 10x: 400nm; 20x: 100nm; 50x: 50nm

Focus Variation

  • Height display resolution:  1nm
  • Height repeatability: 5x: 500nm; 10x: 100nm; 20x: 50nm; 50x: 30nm
  • Width display resolution: 1nm
  • Width repeatability: 5x: 400nm; 10x: 400nm; 20x: 120nm; 50x: 65nm

White Light Interferometry

  • Height display resolution: 0.01nm
  • Width display resolution: 0.1nm
  • Surface topography repeatability: 0.08nm