Image
Code
EVAP2
Model
Kurt Lesker PVD 75
Location
Cleanroom
Primary Training Contact
Helpful Links
Applications
- E-Beam evaporation of the following metals:
- Al, Au, Cr, Ni, Pt, Ti, Ag, Cu
- Contact SMIF to request other materials
- Thermal evaporation of the following metals:
- Au-Ge, Ge
- Contact SMIF to request other materials
Features
- Ability to electron beam evaporate or thermally evaporate metals
- Quartz crystal thickness monitoring
Specifications
- 4 x 7cc e-beam evaporation pockets
- 1 thermal evaporation pocket