Dry Oxidation

Code

FURN2-Tube2

Model

Tempress 6304 4-Stack Furnace

Location

Cleanroom

Primary Training Contact

Contact SMIF if you are interested in using this furnace. This equipment is operated by SMIF staff only.

All samples must be approved by SMIF and go through SMIF approved cleaning prior to processing

Applications

Features

Capable of handling small pieces up to 4" wafers (6" possible with additional boats)

Specifications