Chemicals

SMIF Supplied Chemicals

SMIF supplies most of the “standard” chemicals that are used in the facility. These chemicals are available to all certified users, and their use in covered in the usage fees. We ask that you do not bring in your own bottles of these chemicals.

Other Approved Chemicals

Chemicals in this list have been authorized for usage within SMIF, but are not supplied by the SMIF facility. Authorization is not needed to bring these chemicals into the facility, but we ask that you contact SMIF before using them to ensure available storage and verify proper use and disposal.

Any chemical that is not on the approved chemical list must first be authorized by SMIF before it can be brought into the facility. To bring a new chemical into the facility you must:

  • Contact SMIF, and obtain approval before ordering the chemical
  • Supply SMIF with an MSDS / SDS for the chemical from the manufacturer
  • Ensure that the chemical is labeled properly:
    • Name of chemical as it appears on MSDS / SDS
    • Physical and health hazards of the chemical
    • Your name and date
  • Contact SMIF to verify proper storage, use, and disposal of the chemical

SMIF Supplied Chemicals

Item

Description

CAS Number

Location

Particularly Hazardous?

SOP

1165 Resist Remover (NMP) Microposit Remover 1165 Resist Remover (NMP)
To be used in solvent hoods!!!
 872-50-4 Solvent Cabinet  Yes  SOP
Acetic Acid Glacial Acetic Acid

Liquid, 500mL

 64-19-7

Solvent Cabinet

   SOP
Acetone Acetone
Liquid, 4L bottle
 67-64-1 Solvent Cabinets, squirt bottles    SOP
Ammonium Hydroxide Ammonium Hydroxide (NH4OH)
Liquid, 4L bottle
 1336-21-6 Oxidizer Cabinet   SOP
Araldite GY 502 Araldite GY 502   Acid Cabinet, Prep Lab    SOP
(BDMA) N-Benzyldimethylamine (BDMA) N-Benzyldimethylamine 103-83-3 Acid Cabinet, Prep Lab    SOP
BOE Buffered Oxide Etch 10:1
Liquid, 4L bottle
 12125-01-8, 7664-39-3, 7732-18-5 Acid Cabinet  Yes SOP
DDSA Dodecenyl Succinic Anhydride
Liquid, 450mL
 26544-38-7 Acid Cabinet, Prep Lab    SOP
D.E.R. 736 EPOXY RESIN D.E.R. 736 EPOXY RESIN 41638-13-5 Acid Cabinet, Prep Lab    SOP
DMAE Dimethylaminoethanol DMAE Dimethylaminoethanol 108-01-0 Acid Cabinet, Prep Lab    SOP
DMP-30 Ancamine K54 Curing Agent
Liquid, 50mL
 90-72-2, 71074-89-0 Acid Cabinet, Prep Lab    SOP
Embed 812 Embed 812 Epon resin
Liquid, 450mL
 25068-38-6 Acid Cabinet, Prep Lab    SOP
ERL 4221 ERL 4221   Acid Cabinet, Prep Lab    SOP
Ethanol Denatured Ethanol

Liquid, 1pt

 64-17-5

Solvent Cabinet, Prep Lab

   SOP
Formaldehyde (20% aqueous) 20% Paraformaldehyde (formaldehyde) solution
Liquid, 10 - 10mL Vials
 30525-89-4 Refrigerator, Chase  Yes  SOP
Glutaraldehyde (25% aqueous) Glutaraldehyde (25% aqueous)
Liquid, 10 - 10mL Vials
 111-30-8 Refrigerator, Chase  Yes  SOP
Gold Etchant GE-8110 Gold Etchant GE-8110
Appearance and odor: dark brown liquid with iodine vapor odor.

Etch Rate ( 30 °C):  20Å/sec

 7553-562, 7681-11-0, 7783-28-0 Acid cabinet    SOP
HMDS Hexamethyldisilazane
Liquid, 100g
 999-97-3 Solvent Cabinet, Prep Lab    SOP
Hydrochloric Acid Hydrochloric Acid (HCl)
Liquid, 4L bottle
7647-01-0 Acid Cabinet    SOP
Hydrofluoric Acid Hydrofluoric Acid (HF)
Liquid, 4L bottle
 7664-39-3 Acid Cabinet  Yes - Acutely Toxic  SOP
Hydrogen Peroxide Hydrogen Peroxide (H2O2)
Liquid, 4L vented bottle
 7722-84-1 Oxidizer Cabinet  Yes - Acutely Toxic  SOP
Iodine LUGOL'S IODINE, CONCENTRATED, WEIGERT (USP STRONG IODINE SOLUTION) 7553-56-2, 7681-11-0 Vitrobot Hood, Prep Lab    SOP
Isopropyl Alcohol Isopropyl Alcohol (IPA / 2-Propanol)
Liquid, 4L bottle
 67-63-0 Solvent Cabinet    SOP
Lead Citrate Lead Citrate, Trihydrate
Small crystals, 100g
 512-26-5 N2 Box, Prep Lab  Yes  SOP
Methanol Methyl Alcohol
Liquid, 4L bottle
 67-56-1 Solvent Cabinet    SOP
MF-319 Developer Microposit MF-319 Photoresist Developer
Liquid, 1 gallon bottle
 7732-18-5, 75-59-2 Developer Cabinet, Photo Bay    SOP
MIBK Methyl Isobutyl Ketone  108-10-1 Solvent Cabinet    SOP
NFR016D2 NFR016D2 negative resist  

Resist Cabinet, Photo Bay

   SOP
Nitric Acid Nitric Acid (HNO3)
Liquid, 4L glass bottle
 7697-37-2 Acid Cabinet  Yes  SOP
NMA Methyl-5-Norbornene-2,3-Dicarboxylic Anhydride
Liquid, 450mL
 25134-21-8 Acid Cabinet, Prep Lab    SOP
NSA (Nonenyl Succinic Anhydride Modified) NSA (Nonenyl Succinic Anhydride Modified)   Acid Cabinet, Prep Lab    SOP
OsO4 (4% ) Osmium Tetroxide (4%)
Liquid, 10 - 10mL Vials
 20816-12-0 Refrigerator, Chase  Yes - Acutely Toxic  SOP
o-Xylene o-Xylene  95-47-6

Solvent Cabinet

   SOP
P20 Adhesion Promoter Microprime Primer P20 Adhesion Promoter
Liquid, 4L bottle
  Resist Cabinet, Photo Bay    SOP
PBS, 10x Phosphate Buffered Saline, 10x
Liquid, 1L
  Refrigerator, Chase  Not Hazardous  None
PMMA (495) PMMA (495) - polymethyl methacrylate
Liquid, for e-beam lithography
 9011-14-7 Resist Cabinet, Photo Bay    SOP
PMMA (950) PMMA (950) - polymethyl methacrylate
Liquid, for e-beam lithography
 9011-14-7 Resist Cabinet, Photo Bay    SOP
Positive Resist S-1813 Shipley Microposit S-1813 Positive Photoresist
Liquid, 1 qt. bottle
 108-65-6, 1319-77-3 Resist Cabinet, Photo Bay    SOP
Potassium Hydroxide Potassium Hydroxide (KOH)
Liquid, 4L bottle
 1310-58-3 Oxidizer Cabinet    SOP
Propylene Oxide Propylene Oxide
Liquid, 500mL bottle
 75-56-9 Solvent Cabinet, Prep Lab  Yes  SOP
PTA Phosphotungstic Acid
Powder,  100g
 12501-23-4 N2 Box, Prep Lab    SOP
Sodium Acetate Sodium Acetate,Trihydrate
GRANULAR SOLID, 500g
 127-09-3 N2 Box, Prep Lab    SOP
Sodium Cacodylate Sodium Cacodylate, Trihydrate
Small Crystals, 500g
 124-65-2 N2 Box, Prep Lab  Yes  SOP
Sodium Hydroxide Sodium Hydroxide
Pellets, 500g
1310-73-2 Acid Cabinet, Prep Lab   SOP
SU-8 10 SU-8 10   Resist Cabinet, Photo Bay    SOP
SU-8 Developer SU-8 Developer

 108-65-6, 70657-70-4

Resist Cabinet, Photo Bay    SOP
Sulfuric Acid Sulfuric Acid (H2SO4)
Liquid, 4L bottle
 7664-93-9 Acid Cabinet  Yes - Carcinogen  SOP
TCE Trichloroethylene (TCE)
Liquid, 4L bottle
 79-01-06 Solvent cabinet  Yes SOP
Uranyl Acetate Uranyl Acetate
Powder, 25g
 541-09-3 N2 Box, Prep Lab Yes  SOP
Uranyl Formate Uranyl Formate 16984-59-1 N2 Box, Prep Lab    SOP
ZEP520A E-beam resist ZEP520A E-beam resist
For e-beam lithography on EBL1
  Resist Cabinet, Photo Bay    SOP

Other Approved Chemicals

Item

Description

Location

SOP

1H,1H,2H,2H-perfluorodecyltriethoxysilane 1H,1H,2H,2H-perfluorodecyltriethoxysilane Solvent cabinet  SOP
3-Phenylpropane-1-thiol

3-Phenylpropane-1-thiol (CAS number 24734-68-7)

Solvent cabinet SOP
Aluminum Etch Type A Aluminum Etch Type A Acid Cabinet  SOP
AZ 327 Developer AZ 327 MIF Developer
Liquid, 1 gallon bottle
Developer Cabinet, Photo Bay  SOP
AZ 400K Developer AZ 400K Photoresist Developer Developer Cabinet, Photo Bay  SOP
AZ 917 MIF Developer AZ 917 MIF Developer Developer Cabinet, Photo Bay  SOP
AZ P4620 Photoresist AZ P4620 Photoresist Resist Cabinet, Photo Bay  SOP
BCB BCB / Cyclotene
Liquid, various types of BCB
Resist Cabinet, Photo Bay  SOP
Buffer Solution, pH7 Buffer Solution, pH7 Solvent cabinet  SOP
CD-26 CD-26 Resist Cabinet, Photo Bay  SOP
Chloroform Chloroform
Liquid
Solvent cabinet  SOP
Chromium Etchant Type 1020 Chromium Etchant Type 1020 Acid Cabinet  SOP
Chromium Etchant 9057 Chromium Etchant 9057 Acid Cabinet  SOP
Copper Etch APS-100 Copper Etch APS-100 Oxidizer Cabinet  SOP
Copper Etchant 100/200 Copper Etchant 100/200 Acid cabinet  SOP
CR-14 Chromium Etchant CR-14 Chromium Etchant Acid cabinet  SOP
CR-7 Chromium Etchant CR-7 Chromium Etchant Acid cabinet SOP
Cytop Cytop CTX-809A Resist Cabinet, Photo Bay  SOP
Cytop Solvent Cytop CT-SOLV180 Resist Cabinet, Photo Bay  SOP
Dynastrip DL9150 Dynastrip DL9150 Solvent Cabinet  SOP
Gold Etchant TFA Gold Etchant TFA Acid Cabinet  SOP
Iron Oxide Etchant 9028 Iron Oxide Etchant 9028 Acid Cabinet  SOP
JSR JPD523AD-10MA JSR JPD523AD-10MA Developer Cabinet, Photo Bay  SOP
JSR PFR IX420H Photoresist Resist Cabinet, Photo Bay  SOP
JSR PFR IX965G Photoresist Resist Cabinet, Photo Bay  SOP
LOR A Series Resist LOR A Series Resist Resist Cabinet, Photo Bay  SOP
Ma-D 553/s developer Ma-D 553/s developer Developer Cabinet, Photo Bay  SOP
Ma-N 1400 negative tone photoresist series Ma-N 1400 negative tone photoresist series Resist Cabinet, Photo Bay  SOP
Ma-N2403 Resist Ma-N2403 Resist Flammables Refrigerator, Photo Bay SOP
MIBK Methyl Isobutyl Ketone Solvent cabinet  SOP
N,N-Dimethylformamide (DMF) N,N-Dimethylformamide
DMF
Solvent cabinet  SOP
P(VDF-TrFE) poly(vinylidene difluoride - trifluoroethylene) Resist Cabinet, Photo Bay  SOP
PA-400R Polyimide PA-400R Polyimide Resist Cabinet, Photo Bay  SOP
PD523AD Developer PD 523AD Developer Developer Cabinet, Photo Bay  SOP
PDMS Polydimethylsiloxane Bio Bay  None
Pentaerythritol tetrakis(3-mercaptopropionate) (PETMP) Pentaerythritol tetrakis(3-mercaptopropionate) (PETMP) N2 Box, Photo Bay  SOP
Phenylmethanethiol (aka Benzyl mercaptan)

Phenylmethanethiol (aka Benzyl mercaptan)(CAS number 100-53-8)

Solvent cabinet SOP
Phosphoric Acid Phosphoric Acid (H3PO4)
Liquid
Acid cabinet  SOP
Polyimide PI 2611 Polyimide PI 2611 Resist Cabinet, Photo Bay  SOP
Potassium Titanium Oxide Oxalate Dihydrate Potassium Titanium Oxide Oxalate Dihydrate Acid Cabinet, Prep Lab  SOP
Sodium Dodecyl Sulfate Sodium Dodecyl Sulfate
Flammable
Solvent cabinet  None
Spin-On-Glass (SOG) Accuglass "T−12B"(312B,412B,512B) Spin-On-Glass Resist Cabinet, Photo Bay  SOP
SPR-2012 SPR-2012 Resist Cabinet, Photo Bay  SOP
SU-8 SU-8 Photoresist
Liquid, various types of SU-8
Resist Cabinet, Photo Bay  SOP
SU-8 2000 Thinner SU-8 2000 Thinner Resist Thinner Resist Cabinet, Photo Bay  SOP
Teflon AF Teflon AF Resist Cabinet, Photo Bay  SOP
Tetramethylsilane Tetramethylsilane
Very Flammable
Flammable Rated Refrigerator  SOP
Titanium Etchant TFT Titanium Etchant TFT Acid Cabinet  SOP
TMAH Tetramethylammonium Hydroxide Developer Cabinet, Photo Bay  SOP
Toluene Toluene
Liquid
Solvent cabinet  SOP
Transene Copper Etchant Transene Copper Etchant Acid Cabinet  SOP
VM651 Adhesion Promoter VM651 Adhesion Promoter Resist Cabinet, Photo Bay  SOP
VM652 Adhesion Promoter VM652 Adhesion Promoter Resist Cabinet, Photo Bay  SOP