SMIF Supplied Chemicals

SMIF supplies most of the “standard” chemicals that are used in the facility. These chemicals are available to all certified users, and their use in covered in the usage fees. We ask that you do not bring in your own bottles of these chemicals.

Other Approved Chemicals

Chemicals in this list have been authorized for usage within SMIF, but are not supplied by the SMIF facility. Authorization is not needed to bring these chemicals into the facility, but we ask that you contact SMIF before using them to ensure available storage and verify proper use and disposal.

Any chemical that is not on the approved chemical list must first be authorized by SMIF before it can be brought into the facility. To bring a new chemical into the facility you must:

  • Contact SMIF, and obtain approval before ordering the chemical
  • Supply SMIF with an MSDS / SDS for the chemical from the manufacturer
  • Ensure that the chemical is labeled properly:
    • Name of chemical as it appears on MSDS / SDS
    • Physical and health hazards of the chemical
    • Your name and date
  • Contact SMIF to verify proper storage, use, and disposal of the chemical

SMIF Supplied Chemicals



CAS Number


Particularly Hazardous?


1165 Resist Remover (NMP) Microposit Remover 1165 Resist Remover (NMP)
To be used in solvent hoods!!!
 872-50-4 Solvent cabinet  Yes  SOP
Acetic Acid Glacial Acetic Acid

Liquid, 500mL


Acidcab01, Rm 1562

Acetone Acetone
Liquid, 4L bottle
 67-64-1  Solvent cabinets, squirt bottles  No  SOP
Ammonium Hydroxide Ammonium Hydroxide (NH4OH)
Liquid, 4L bottle
 1336-21-6     SOP
Araldite GY 502 Araldite GY 502        
(BDMA) N-Benzyldimethylamine (BDMA) N-Benzyldimethylamine 103-83-3      
BOE Buffered Oxide Etch 10:1
Liquid, 4L bottle
 12125-01-8, 7664-39-3, 7732-18-5    Yes SOP
DDSA Dodecenyl Succinic Anhydride
Liquid, 450mL
 26544-38-7 Solvcab01, rm 1562    
D.E.R. 736 EPOXY RESIN D.E.R. 736 EPOXY RESIN 41638-13-5      
DMAE Dimethylaminoethanol DMAE Dimethylaminoethanol 108-01-0      
DMP-30 Ancamine K54 Curing Agent
Liquid, 50mL
 90-72-2, 71074-89-0 Solvcab01, Rm 1562    
Embed 812 Embed 812 Epon resin
Liquid, 450mL
 25068-38-6 Solvcab01, rm1562  No  
ERL 4221 ERL 4221        
Ethanol Denatured Ethanol

Liquid, 1pt


Solvcab 01, Room 1562

Ethylene Glycol Ethylene Glycol
Liquid, 4L bottle, for chillers
Formaldehyde (20% aqueous) 20% Paraformaldehyde (formaldehyde) solution
Liquid, 10 - 10mL Vials
 30525-89-4 Refrigerator, Rm 1562    
Glutaraldehyde (25% aqueous) Glutaraldehyde (25% aqueous)
Liquid, 10 - 10mL Vials
 111-30-8 Refrigerator, Rm 1562  Yes  SOP
Gold Etchant GE-8110 Gold Etchant GE-8110
Appearance and odor: dark brown liquid with iodine vapor odor.

Etch Rate ( 30 °C):  20Å/sec

 7553-562, 7681-11-0, 7783-28-0 Acid cabinet    SOP
HMDS Hexamethyldisilazane
Liquid, 100g
 999-97-3 Solvcab01, Rm 1562    
Hydrochloric Acid Hydrochloric Acid (HCl)
Liquid, 4L bottle
7647-01-0    No  SOP
Hydrofluoric Acid Hydrofluoric Acid (HF)
Liquid, 4L bottle
 7664-39-3    Yes - Acutely Toxic  SOP
Hydrogen Peroxide Hydrogen Peroxide (H2O2)
Liquid, 4L vented bottle
 7722-84-1    Yes - Acutely Toxic  SOP
Isopropyl Alcohol Isopropyl Alcohol (IPA / 2-Propanol)
Liquid, 4L bottle
 67-63-0    No  SOP
Lead Citrate Lead Citrate, Trihydrate
Small crystals, 100g
 512-26-5 N2 Box, Rm 1562  Yes  SOP
Methanol Methyl Alcohol
Liquid, 4L bottle
 67-56-1      SOP
MF-319 Developer Microposit MF-319 Photoresist Developer
Liquid, 1 gallon bottle
 7732-18-5, 75-59-2      SOP
MIBK Methyl Isobutyl Ketone  108-10-1      SOP
NaOH Sodium Hydroxide
Pellets, 500g
 1310-73-2 Acidcab01, Rm 1562    SOP
NFR016D2 NFR016D2 negative resist  

Resist storage cabinets

Nitric Acid Nitric Acid (HNO3)
Liquid, 4L glass bottle
 7697-37-2    Yes  SOP
NMA Methyl-5-Norbornene-2,3-Dicarboxylic Anhydride
Liquid, 450mL
 25134-21-8 Solvcab01, Rm 1562    
NSA (Nonenyl Succinic Anhydride Modified) NSA (Nonenyl Succinic Anhydride Modified)        
OsO4 (4% ) Osmium Tetroxide (4%)
Liquid, 10 - 10mL Vials
 20816-12-0 Refrigerator Rm1562  Yes - Acutely Toxic  SOP
o-Xylene o-Xylene  95-47-6

Solvent cabinet, Photo Bay

P20 Adhesion Promoter Microprime Primer P20 Adhesion Promoter
Liquid, 4L bottle
Parylene Dimer Parylene Type C Dimer
Solid pellets, for use in PARYL1
 28804-46-8 Beside PARYL1, Sample Prep & Offline Lab, 1562 Fitzpatrick CIEMAS    
PBS, 10x Phosphate Buffered Saline, 10x
Liquid, 1L
  Refrigerator, Rm 1562    
PMMA (495) PMMA (495) - polymethyl methacrylate
Liquid, for e-beam lithography
 9011-14-7      SOP
PMMA (950) PMMA (950) - polymethyl methacrylate
Liquid, for e-beam lithography
 9011-14-7      SOP
Positive Resist S-1813 Shipley Microposit S-1813 Positive Photoresist
Liquid, 1 qt. bottle
 108-65-6, 1319-77-3    No (Potential Teratogen)  SOP
Potassium Hydroxide Potassium Hydroxide (KOH)
Liquid, 4L bottle
 1310-58-3      SOP
Propylene Oxide Propylene Oxide
Liquid, 500mL bottle
 75-56-9 Solvcab01, Rm1562  Yes  SOP
PTA Phosphotungstic Acid
Powder,  100g
 12501-23-4 N2 Box, Rm 1562    
Sodium Acetate Sodium Acetate,Trihydrate
 127-09-3 N2 Box, Rm 1562    
Sodium Cacodylate Sodium Cacodylate, Trihydrate
Small Crystals, 500g
 124-65-2 N2 Box, Rm 1562    SOP
SU-8 10 SU-8 10   Resist storage cabinet    SOP
SU-8 Developer SU-8 Developer

 108-65-6, 70657-70-4

Solvent storage cabinet (Resists)    
Sulfuric Acid Sulfuric Acid (H2SO4)
Liquid, 4L bottle
 7664-93-9    Yes - Carcinogen  SOP
TCE Trichloroethylene (TCE)
Liquid, 4L bottle
 79-01-06 Solvent cabinet  Yes SOP
Uranyl Acetate Uranyl Acetate
Powder, 25g
 541-09-3 N2 Box, Rm 1562 Yes  SOP
Uranyl Formate Uranyl Formate 16984-59-1      
ZEP520A E-beam resist ZEP520A E-beam resist
For e-beam lithography on EBL1
  Resist/Solvent cabinet in the photo area    SOP

Other Approved Chemicals




1H,1H,2H,2H-perfluorodecyltriethoxysilane 1H,1H,2H,2H-perfluorodecyltriethoxysilane Solvent hoods & Solvent cabinets
Aluminum Etch Type A Aluminum Etch Type A Acid Cabinet
AZ 327 Developer AZ 327 MIF Developer
Liquid, 1 gallon bottle
AZ 400K Developer AZ 400K Photoresist Developer  
AZ 917 MIF Developer AZ 917 MIF Developer Developer cabinet
AZ P4620 Photoresist AZ P4620 Photoresist Solvent cabinet
BCB BCB / Cyclotene
Liquid, various types of BCB
Solvent cabinet
Buffer Solution, pH7 Buffer Solution, pH7  
CD-26 CD-26  
Chloroform Chloroform
Solvent cabinet
Chromium Etchant Type 1020 Chromium Etchant Type 1020 Acid Storage Cabinets in the Cleanroom
Chromium Etchant 9057 Chromium Etchant 9057 Acid Cabinet
Copper Etch APS-100 Copper Etch APS-100 Oxidizer Cabinet
Copper Etchant 100/200 Copper Etchant 100/200 Acid cabinet
CR-14 Chromium Etchant CR-14 Chromium Etchant Acid cabinet
CR-7 Chromium Etchant CR-7 Chromium Etchant Acid cabinet
Cytop Cytop CTX-809A  
Cytop Solvent Cytop CT-SOLV180  
Dynastrip DL9150 Dynastrip DL9150 Solvent Hoods
Gold Etchant TFA Gold Etchant TFA Acid Cabinet
Iron Oxide Etchant 9028 Iron Oxide Etchant 9028 Acid Cabinet
JSR JPD523AD-10MA JSR JPD523AD-10MA Developer Cabinet
JSR PFR IX420H Photoresist Resist Cabinets
JSR PFR IX965G Photoresist Resist Cabinets
LOR A Series Resist LOR A Series Resist  
Ma-D 553/s developer Ma-D 553/s developer  
Ma-N 1400 negative tone photoresist series Ma-N 1400 negative tone photoresist series  
MIBK Methyl Isobutyl Ketone Solvent cabinet
N,N-Dimethylformamide (DMF) N,N-Dimethylformamide
Solvent cabinet
P(VDF-TrFE) poly(vinylidene difluoride - trifluoroethylene)  
PA-400R Polyimide PA-400R Polyimide  
PD523AD Developer PD 523AD Developer  
PDMS Polydimethylsiloxane  
Pentaerythritol tetrakis(3-mercaptopropionate) (PETMP) Pentaerythritol tetrakis(3-mercaptopropionate) (PETMP)  
Phosphoric Acid Phosphoric Acid (H3PO4)
Acid cabinet
Polyimide PI 2611 Polyimide PI 2611 Solvent cabinet
Potassium Titanium Oxide Oxalate Dihydrate Potassium Titanium Oxide Oxalate Dihydrate Sample prep room
Sodium Dodecyl Sulfate Sodium Dodecyl Sulfate
Spin-On-Glass (SOG) Accuglass "T−12B"(312B,412B,512B) Spin-On-Glass Resist/solvent storage cabinet in the photo area
SPR-2012 SPR-2012  
SU-8 SU-8 Photoresist
Liquid, various types of SU-8
Solvent cabinet
SU-8 2000 Thinner SU-8 2000 Thinner Resist Thinner Photo area solvent cabinet
Teflon AF Teflon AF  
Tetramethylsilane Tetramethylsilane
Very Flammable
Stored only in flammable rated refrigerator and used only in solvent hoods
Titanium Etchant TFT Titanium Etchant TFT Acid Cabinet
TMAH Tetramethylammonium Hydroxide  
Toluene Toluene
Solvent cabinet
Transene Copper Etchant Transene Copper Etchant Acid Hood, Acid cabinets
Uranyl Formate Uranyl Formate
Used in TEM sample prep
Sample Prep Lab
VM651 Adhesion Promoter VM651 Adhesion Promoter Solvent cabinet
VM652 Adhesion Promoter VM652 Adhesion Promoter Solvent cabinet