Chemicals

SMIF Supplied Chemicals

SMIF supplies most of the “standard” chemicals that are used in the facility. These chemicals are available to all certified users, and their use in covered in the usage fees. We ask that you do not bring in your own bottles of these chemicals.

Other Approved Chemicals

Chemicals in this list have been authorized for usage within SMIF, but are not supplied by the SMIF facility. Authorization is not needed to bring these chemicals into the facility, but we ask that you contact SMIF before using them to ensure available storage and verify proper use and disposal.

Any chemical that is not on the approved chemical list must first be authorized by SMIF before it can be brought into the facility. To bring a new chemical into the facility you must:

  • Contact SMIF, and obtain approval before ordering the chemical
  • Supply SMIF with an MSDS / SDS for the chemical from the manufacturer
  • Ensure that the chemical is labeled properly:
    • Name of chemical as it appears on MSDS / SDS
    • Physical and health hazards of the chemical
    • Your name and date
  • Contact SMIF to verify proper storage, use, and disposal of the chemical

SMIF Supplied Chemicals

Item

Description

Location

1165 Resist Remover (NMP) Microposit Remover 1165 Resist Remover (NMP)
To be used in solvent hoods!!!
Solvent cabinet
Acetic Acid Glacial Acetic Acid

Liquid, 500mL

Acidcab01, Rm 1562

Acetone Acetone
Liquid, 4L bottle
 
Ammonium Hydroxide Ammonium Hydroxide (NH4OH)
Liquid, 4L bottle
 
BOE Buffered Oxide Etch 10:1
Liquid, 4L bottle
 
DDSA Dodecenyl Succinic Anhydride
Liquid, 450mL
Solvcab01, rm 1562
DMP-30 Ancaminek 54 Curing Agent
Liquid, 50mL
Solvcab01, Rm 1562
Embed 812 Embed 812 Epon resin
Liquid, 450mL
Solvcab01, rm1562
Ethanol Denatured Ethanol

Liquid, 1pt

Solvcab 01, Room 1562

Ethylene Glycol Ethylene Glycol
Liquid, 4L bottle, for chillers
 
Formaldehyde (20% aqueous) 20% Paraformaldehyde (formaldehyde) solution
Liquid, 10 - 10mL Vials
Refrigerator, Rm 1562
Glutaraldehyde (25% aqueous) Glutaraldehyde (25% aqueous)
Liquid, 10 - 10mL Vials
Refrigerator, Rm 1562
Gold Etchant GE-8110 Gold Etchant GE-8110
Appearance and odor: dark brown liquid with iodine vapor odor.

Etch Rate ( 30 °C):  20Å/sec

Acid cabinet
HMDS Hexamethyldisilazane
Liquid, 100g
Solvcab01, Rm 1562
Hydrochloric Acid Hydrochloric Acid (HCl)
Liquid, 4L bottle
 
Hydrofluoric Acid Hydrofluoric Acid (HF)
Liquid, 4L bottle
 
Hydrogen Peroxide Hydrogen Peroxide (H2O2)
Liquid, 4L vented bottle
 
Isopropyl Alcohol Isopropyl Alcohol (IPA / 2-Propanol)
Liquid, 4L bottle
 
Lead Citrate Lead Citrate, Trihydrate
Small crystals, 100g
N2 Box, Rm 1562
Methanol Methyl Alcohol
Liquid, 4L bottle
 
MF-319 Developer Microposit MF-319 Photoresist Developer
Liquid, 1 gallon bottle
 
MIBK: IPA (1:3) Methyl Isobutyl Ketone & IPA (1:3 ratio)
Liquid, 4L bottle
 
NaOH Sodium Hydroxide
Pellets, 500g
Acidcab01, Rm 1562
NFR016D2 NFR016D2 negative resist

Resist storage cabinets

Nitric Acid Nitric Acid (HNO3)
Liquid, 4L glass bottle
 
NMA Methyl-5-Norbornene-2,3-Dicarboxylic Anhydride
Liquid, 450mL
Solvcab01, Rm 1562
OsO4 (4% ) Osmium Tetroxide (4%)
Liquid, 10 - 10mL Vials
Refrigerator Rm1562
o-Xylene o-Xylene

Solvent cabinet, Photo Bay

P20 Adhesion Promoter Microprime Primer P20 Adhesion Promoter
Liquid, 4L bottle
 
Parylene Dimer Parylene Type C Dimer
Solid pellets, for use in PARYL1
Beside PARYL1, Sample Prep & Offline Lab, 1562 Fitzpatrick CIEMAS
PBS, 10x Phosphate Buffered Saline, 10x
Liquid, 1L
Refrigerator, Rm 1562
PMMA (495) PMMA (495) - polymethyl methacrylate
Liquid, for e-beam lithography
 
PMMA (950) PMMA (950) - polymethyl methacrylate
Liquid, for e-beam lithography
 
Positive Resist S-1813 Shipley Microposit S-1813 Positive Photoresist
Liquid, 1 qt. bottle
 
Potassium Hydroxide Potassium Hydroxide (KOH)
Liquid, 4L bottle
 
Propylene Oxide Propylene Oxide
Liquid, 500mL bottle
Solvcab01, Rm1562
PTA Phosphotungstic Acid
Powder,  100g
N2 Box, Rm 1562
Sodium Acetate Sodium Acetate,Trihydrate
GRANULAR SOLID, 500g
N2 Box, Rm 1562
Sodium Cacodylate Sodium Cacodylate, Trihydrate
Small Crystals, 500g
N2 Box, Rm 1562
SU-8 10 SU-8 10 Resist storage cabinet
SU-8 Developer SU-8 Developer Solvent storage cabinet (Resists)
Sulfuric Acid Sulfuric Acid (H2SO4)
Liquid, 4L bottle
 
TCE Trichloroethylene (TCE)
Liquid, 4L bottle
Solvent cabinet
Uranyl Acetate Uranyl Acetate
Powder, 25g
N2 Box, Rm 1562
ZEP520A E-beam resist ZEP520A E-beam resist
For e-beam lithography on EBL1
Resist/Solvent cabinet in the photo area

Other Approved Chemicals

Item

Description

Location

1H,1H,2H,2H-perfluorodecyltriethoxysilane 1H,1H,2H,2H-perfluorodecyltriethoxysilane Solvent hoods & Solvent cabinets
2,3,7,8,12,13,17,18-Octaethyl-21H,23H-porphine zinc(II) 2,3,7,8,12,13,17,18-Octaethyl-21H,23H-porphine zinc(II)  
2-Butanone 2-Butanone  
3-(Trimethoxysily)propyl methacrylate 3-(Trimethoxysily)propyl methacrylate Prep Lab, Solvent Hood
4-Methylmorpholine N-Oxide 4-Methylmorpholine N-Oxide Solution  
5,10,15,20-Tetrakis(pentafluorophenyl)-21H,23Hporphyrin iron(III) chloride 5,10,15,20-Tetrakis(pentafluorophenyl)-21H,23Hporphyrin iron(III) chloride  
5,10,15,20-Tetraphenyl-21H,23H-porphine iron(III) chloride Protoporphyrin IX zinc(II) 5,10,15,20-Tetraphenyl-21H,23H-porphine iron(III) chloride Protoporphyrin IX zinc(II)  
Ag Powder Silver Powder
Silver powder to be mixed outside the cleanroom
 
Agarose Agarose Store in Bio Bay Solvent cabinet
AlPAD Etch 639 AlPAD Etch 639

acid cabinet

Aluminum Etch Aluminum Etch Type D
Liquid, 4L bottle
Acid cabinet
Aluminum Etch Type A Aluminum Etch Type A Acid Cabinet
Ammonium Persulfate Ammonium Persulfate
Powder not to be stored in cleanroom.  Must be mixed into solution outside of cleanroom
Powder not to be stored in cleanroom.  Must be mixed into solution outside of cleanroom
Anisole Anisole
Solvent for ZEP E-Beam resist
Solvent Cabinet
AP3000 Adhesion Promoter AP3000 Adhesion Promoter Solvent cabinet
APTES (3-Aminopropyl triethoxysilane) APTES (3-Aminopropyl) triethoxysilane

Solvent hoods and cabinets

AZ 125nXT Photoresist AZ 125nXT -10A Photoresist Resist storage cabinets
AZ 327 Developer AZ 327 MIF Developer
Liquid, 1 gallon bottle
 
AZ 400K Developer AZ 400K Photoresist Developer  
AZ 400T Resist Stripper AZ 400T Photoresist Stripper  
AZ 9260 Photoresist AZ 9260 Photoresist (520CPS) Solvent cabinet
AZ 917 MIF Developer AZ 917 MIF Developer Developer cabinet
AZ EBR 70/30 AZ EBR 70/30 Solvent cabinet
AZ P4620 Photoresist AZ P4620 Photoresist Solvent cabinet
Barium getter Barium getter

N2 box in prep lab

Barium-Aluminum getter Barium-Aluminum getter

N2 box in prep lab

BCB BCB / Cyclotene
Liquid, various types of BCB
Solvent cabinet
Benzene Benzene Solvent cabinet
Benzoic acid Benzoic acid  
Borosilicafilm Borosilicafilm II Solvent cabinet
Branson OR Branson Oxide Remover
citric acid / ammonium hydroxide
acid hoods & cabinets
BSI.P06090 Brewer Science BSI.P06090 Solvent cabinet
Buffer Solution, pH7 Buffer Solution, pH7  
Carbonate ionophore IV solution Carbonate ionophore IV solution  
Chlorobenzene Chlorobenzene
Liquid
Solvent cabinet
Chloroform Chloroform
Liquid
Solvent cabinet
Chromium Etchant Type 1020 Chromium Etchant Type 1020 Acid Storage Cabinets in the Cleanroom
Chromium Etchant 9057 Chromium Etchant 9057 Acid Cabinet
Copper 2300 Brightener Technic Cu 2300 Brightener  
Copper 2300 Carrier Technic Cu 2300 Carrier  
Copper Etch APS-100 Copper Etch APS-100 Oxidizer Cabinet
Copper Etchant 100/200 Copper Etchant 100/200 Acid cabinet
CR-14 Chromium Etchant CR-14 Chromium Etchant Acid cabinet
CR-7 Chromium Etchant CR-7 Chromium Etchant Acid cabinet
Cytop Cytop CTX-809A  
Cytop Solvent Cytop CT-SOLV180  
DC4-500 Dielectric Coating Futurrex DC4-500 Dielectric Coating  
Diacetone Alcohol Diacetone Alcohol Solvent cabinet
         
Dichloromethane Methylene Dichloride Solvent Cabinet...waste to be disposed of in Chlorinated Solvent Waste containers
Dimethyl Sulfoxide Dimethyl Sulfoxide  
DS2100 Developer DS2100 Developer (Dow)
Liquid
 
EBR PG Positive Radiation Resist Edge Bead Remover Photo area solvent cabinet
EDTA EDTA 50%  
EKC162 EKC162 solvent hoods outside of photo area
Elevate Cu Electrolyte 20 Elevate Cu Electrolyte 20 Acid Hood, Acid Cabinet
EpoTek 301 epoxy Epoxy Technology EpoTek 301 epoxy  
Epoxy Silane Epoxy Silane (3-glycidoxypropyltrimethoxysilane) nitrogen glove box in the cleanroom
Ethanol Ethyl Alcohol  
Ethanolamine Ethanolamine Solvent hoods and solvent cabinets
Ethyl Lactate Ethyl Lactate  
EXP06059 Brewer Science EXP06050 Solvent cabinet
FC-75 Fluorinert FC-75 Fluorinert  
Ferric Chloride Ferric Chloride - FeCl3
Liquid
 
Filmtronics F100SM-F900SM Filmtronics F100SM-F900SM
Spin on dopant / spin on glass
Solvent cabinet
Filmtronics FG65 SOG Filmtronics FG65 Series Spin-on Glass Solvent cabinet
Formic Acid Formic Acid Acid cabinet
Glucose Glucose  
Gold Etchant GE-8148 Gold Etchant GE-8148 Acid cabinet
Gold Etchant TFA Gold Etchant TFA Acid Cabinet
HD-4100 Polyamic Ester HD-4100 Polyamic Ester  
Hemin Hemin  
Hexafluoroisopropanol Hexafluoroisopropanol Refrigerator or Solvent cabinet
Hexane Hexane / Hexanes
Liquid
Solvent cabinet
Hydrobromic Acid Hydrobromic Acid (HBr)
Liquid
Acid cabinet
IC1-200 Intermediate Coating Futurrex IC1-200 Intermediate Coating  
Intralipid Phospholipid stabilized soybean oil Bio bay in Solvent cabinet
Iron Oxide Etchant 9028 Iron Oxide Etchant 9028 Acid Cabinet
JSR JPD523AD-10MA JSR JPD523AD-10MA Developer Cabinet
JSR PFR IX420H Photoresist Resist Cabinets
JSR PFR IX965G Photoresist Resist Cabinets
Lithium Chloride Lithium Chloride
Only to be used in solution in the cleanroom
 
LOR A Series Resist LOR A Series Resist  
Ma-D 553 Developer Ma-D 553 Developer Developer storage cabinet
Ma-N 1410 resist Ma-N 1410 resist Photoresist storage
Mesitylene Mesitylene
Liquid
Solvent cabinet
MF-354 Developer Microposit MF-354 Photoresist Developer
Liquid, 4L bottle
WET1 Hood Storage
MIBK Methyl Isobutyl Ketone Solvent cabinet
Microprime 90 (MP90) Microprime 90 (MP90) Adhesion Promoter
contains HMDS
Solvent cabinet
Microprime 95 (MP95) Microprime 95 (MP95) Adhesion Promoter
contains HMDS
Solvent cabinet
Microprime HP Primer Microprime HP Primer (100% HMDS)
Hexamethyldisilazane (HMDS) 100%
Solvent cabinet
Model Fullcure 720 Model Fullcure 720  
N,N-Dimethylacetamide N,N-Dimethylacetamide  
N,N-Dimethylformamide (DMF) N,N-Dimethylformamide
DMF
Solvent cabinet
Nano-Strip Cyantek Corporation Nano-Strip
H2SO4, H2SO5, H2O2, and H2O mixture
Acid Cabinet
Negative Resist NR1-3000PY Futurrex NR1-3000PY Negative Photoresist Solvent cabinet
Negative Resist NR1-6000PY Futurrex NR1-6000PY Negative Photoresist Solvent cabinet
Negative Resist NR7-1000P Futurrex NR7-1000P Negative Photoresist Solvent cabinet
Negative Resist NR7-1000PY Futurrex NR7-1000PY Negative Photoresist Solvent cabinet
Negative Resist NR7-80P Futurrex NR7-80P Negative Photoresist Solvent cabinet
Negative Resist NR9-1000PY Futurrex NR9-1000PY Negative Photoresist Solvent cabinet
Negatove Resist NR4-8000P Futurrex Negative Resist NR4-8000P Solvent cabinet
Nichrome Etchant TFN Nichrome Etchant TFN Acid cabinet
NFR 015 Photoresist JFR NFR015 Photoresist solvent cabinet
Norland Optical Adhesive 61 Norland Optical Adhesive 61  
Omnicoat Omnicoat
for SU-8 work
Solvent Cabinet
P(VDF-TrFE) poly(vinylidene difluoride - trifluoroethylene)  
PA-400R Polyimide PA-400R Polyimide  
PA-401D developer PA-401D developer  
Pad Etch 4 Pad Etch 4 Store in solvent cabinet, use in solvent hood, use separate waste container
PD523AD Developer PD 523AD Developer  
PDMS Polydimethylsiloxane  
PGMI 101 Developer PGMI 101 Developer  
Phosphoric Acid Phosphoric Acid (H3PO4)
Liquid
Acid cabinet
Phosphorosilicafilm Phosphorosilicafilm 5 x 10 ** 20 Solvent cabinet
PMGI SF 9s PMGI SF 9s Photoresist Photoresist storage cabinet
PMMA (Nano 200) PMMA (Nano 200) - polymethyl methacrylate Solvent cabinet
Poly - MEH-PPV Poly - MEH-PPV (optical polymer ADS100RE)  
Poly (Cyclohexene Poly propylene carbonate) Poly (Cyclohexene Poly propylene carbonate)  
Poly (propylene carbonate) Poly (propylene carbonate)  
Poly(ethyleneimine) Solution Poly(ethyleneimine) Solution  
Poly(vinyl alcohol) Poly(vinyl alcohol)  
Polyimide PI 2525 Polyimide PI 2525 Solvent cabinet
Polyimide PI 2556 Polyimide PI 2556 Solvent cabinet
Polyimide PI 2611 Polyimide PI 2611 Solvent cabinet
Polyimide PI 2613 Polyimide PI 2613 Solvent cabinet
Positive Resist PR1-1000A Futurrex PR1-1000A Positive Photoresist Solvent cabinet
Positive Resist PR1-2000A Futurrex PR1-2000A Positive Photoresist Solvent cabinet
Positive Resist PR1-4000A Futurrex PR1-4000A Positive Photoresist Solvent cabinet
Primary Stripper A (Dow) Primary Stripper A (Dow)  
Propylene Glycol Monoethyl Acetate Propylene Glycol Monoethyl Acetate  
ProTEK B3 Primer ProTEK B3 Primer  
ProTEK B3-25 ProTEK B3-25  
PZT PZT Sol-Gel Solution E Series Solvent cabinet photo area
Rinse T1100 Rinse T1100 (mesitylene)  
RR2 Resist Remover Futurrex RR2 Photoresist Remover  
RR5 Resist Remover Futurrex RR5 Resist Remover  
Selenious Acid Selenious Acid (H2SeO3) Acid cabinet
Silanol 3-(trimethoxysilyl) Propyl Methacrylate  
Silicon Powder Silicon Powder
Powder not to be stored in cleanroom.  Must be mixed into solution outside of cleanroom
Powder not to be stored in cleanroom.  Must be mixed into solution outside of cleanroom
Silicone Resin Solution DOW CORNING(R) WL-5351 PHOTOPATTERNABLE SPIN-ON SILICONE Refrigerator in cleanroom
Silox Vapox III Silox Vapox III

acid cabinet

Sodium Dodecyl Sulfate Sodium Dodecyl Sulfate
Flammable
 
Sodium Sulfide Sodium Sulfide  
Spin-On-Glass (SOG) Accuglass "T−12B"(312B,412B,512B) Spin-On-Glass Resist/solvent storage cabinet in the photo area
SPR 955 CM-0.7 SPR 955 CM-0.7  
SU-8 SU-8 Photoresist
Liquid, various types of SU-8
Solvent cabinet
SU-8 2000 Thinner SU-8 2000 Thinner Resist Thinner Photo area solvent cabinet
Tannic Acid Tannic Acid  
Techni Copper FB Bath RTU Copper Sulfate Pentahydrate / Sulfuric Acid
For plating
 
Techni Copper FB Brightener Techni Copper FB Brightener (Polyglycols)
For plating
 
Techni Gold 25 ES RTU Techni-Gold 25 ES RTU
For plating
 
Techniflux CU 120 Brightener Techniflux CU 120 Brightener Acid Hood, Acid Cabinet
Techniflux CU 120 Carrier Techniflux CU 120 Carrier Acid Hood, Acid Cabinet
Teflon AF Teflon AF  
TEOS TEOS  
Tetrahydrofuran Tetrahydrofuran (C4H8O) Solvent cabinet
Tetramethylsilane Tetramethylsilane
Very Flammable
Stored only in flammable rated refrigerator and used only in solvent hoods
Titanium Etchant TFT Titanium Etchant TFT Acid Cabinet
TMAH Tetramethylammonium Hydroxide  
Toluene Toluene
Liquid
Solvent cabinet
Transene Copper Etchant Transene Copper Etchant Acid Hood, Acid cabinets
Transene Tin Oxide etchant - 100 Transene Tin Oxide etchant - 100 Acid cabinet
Uranyl Formate Uranyl Formate
Used in TEM sample prep
Sample Prep Lab
VM651 Adhesion Promoter VM651 Adhesion Promoter Solvent cabinet
VM652 Adhesion Promoter VM652 Adhesion Promoter Solvent cabinet