3D Optical Profiler

The Zygo NewView 5000 is a high performance 3D surface metrology system.  It utilizes white light interferometry to produce a 3D topographical map of the sample surface.  All measurements are non-destructive, fast, and require no sample preparation.  Profile heights ranging from < 1nm up to 15mm are possible, with <1nm resolution.  This optical profiler can be used to characterize and quantify step heights, surface roughness, flatness and curvature, critical dimensions, and other topographical features.  The stitching option allows multiple topgraphic scans to be stitched together to form a large field of view image.