Dry Oxidation

Code: 
FURN2-Tube2
Model: 
Tempress 6304 4-Stack Furnace
Location: 
Cleanroom
Primary Training Contact: 

Contact SMIF if you are interested in using this furnace.  This equipment is operated by SMIF staff only.

All samples must be approved by SMIF and go through SMIF approved cleaning prior to processing

Applications: 
  • Dry oxidation
Features: 
  • Capable of handling small pieces up to 4" wafers (6" possible with additional boats)
Specifications: 
  • Temperature range: 950C - 1050C
  • O2 ambient