E-beam & Thermal Metal Evaporator

Code: 
EVAP2
Model: 
Kurt Lesker PVD 75
Location: 
Cleanroom
Primary Training Contact: 
Applications: 
  • E-Beam evaporation of the following metals:
    • Al, Au, Cr, Ni, Pt, Ti, Ag, Cu
    • Contact SMIF to request other materials
  • Thermal evaporation of the following metals:
    • Au-Ge, Ge
    • Contact SMIF to request other materials
Features: 
  • Ability to electron beam evaporate or thermally evaporate metals
  • Quartz crystal thickness monitoring
Specifications: 
  • 4 x 7cc e-beam evaporation pockets
  • 1 thermal evaporation pocket