Spin Coat Hood - RESIST ONLY

Code: 
COATHOOD1
Model: 
Air Control Spin Coat Hood
Location: 
Cleanroom
Primary Training Contact: 
Applications: 
  •  Spin coating of materials (photoresist and EBL resist only)
Features: 
  • Dual Headway spin coaters with ability to be programmed up to 10,000 rpm and up to 9 process steps
  • Solvent cup drain
  • 3 explosion-proof temperature controlled hotplate
  • Dual process timers
  • CO2 fire suppression system