Spin Coat Hood - RESIST ONLY

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Spin Coat Hood - RESIST ONLY
Code
COATHOOD1
Model
Air Control Spin Coat Hood
Location
Cleanroom
Primary Training Contact
Applications
  •  Spin coating of materials (photoresist and EBL resist only)
Features
  • Dual Headway spin coaters with ability to be programmed up to 10,000 rpm and up to 9 process steps
  • Solvent cup drain
  • 3 explosion-proof temperature controlled hotplate
  • Dual process timers
  • CO2 fire suppression system