Image
Code
COATHOOD1
Model
Air Control Spin Coat Hood
Location
Cleanroom
Primary Training Contact
Helpful Links
Applications
- Spin coating of materials (photoresist and EBL resist only)
Features
- Dual Headway spin coaters with ability to be programmed up to 10,000 rpm and up to 9 process steps
- Solvent cup drain
- 3 explosion-proof temperature controlled hotplate
- Dual process timers
- CO2 fire suppression system