Probe Station

Cascade EPS150 Triax
Other Characterization and Imaging Tools
Primary Training Contact: 
Operating Procedures: 

The probe station consists of the following components:

  • Cascade MicroTech EPS150TRIAX Probe Station with light shield enclosure
  • Signatone S-302-4 Four Point Resistivity Probe Station
  • Keithley 4200-SCS Parametric Analyzer
  • Agilent 4284A LCR Meter

The  Cascade MicroTech EPS150TRIAX Probe Station allows the user to probe small features and measure current, voltage, resistance, capacitance and conductance.  The current and voltage applied to the device can be "swept" through an operator determined range and the results can be viewed and saved in a graphical format.  Capacitance and conductance can be measured over a frequency range of  20Hz to 1MHz.

The Signatone four point resistivity probing system is used to make sheet resistance and resistivity measurements of substrates and thin films.  It interfaces with the Keithley 4200-SCS Parametric Analyzer to perform these measurements.



  • I-V characterization
  • Low current measurements
  • C-V characterization (at multiple frequencies)
  • Resistance and conductance measurements
  • Sheet resistance and resistivity measurements of substrates and deposited films

Cascade EPS150TRIAX Probe Station

  • Vacuum chuck and magnetic base micropositioners
  • Micropositioner movement in x,y, and z
  • Trinocular 6.7x stereo zoom microscope with 100x magnification

Signatone S-302-4 Four Point Resistivity Probe Station

  • 100mm probe stand with probe head quick mounting block
  • 4 point probe head with 5mil radius tips of 40mil spacing

Keithley 4200-SCS Parametric Analyzer

  • Integrated PC with Windows-based graphical user interface
  • Export data in Excel or ASCII formats and plots in bitmap, jpeg or tiff formats
  • Interactive test environment allows for automated test sequences without writing code
  • Configured with 3 SMUs (source-measure units)
  • Configured with remote PreAmps for low current measurements

Agilent 4284A LCR Meter

  • 20Hz to 1MHz with over 8,600 test frequencies
  • 0.05% basic accuracy, 6 digit resolution
  • Constant V or I test signal level
  • SMU Voltage measurement range: 1mV - 200V
  • SMU Voltage measurement resolution: 1mV
  • SMU Current measurement range: 0.1fA - 1A
  • SMU Current measurement resolution: 0.1fA

For Agilent 4284 LCR meter, see product data sheet. Click here for data sheet