Frontside/Backside Mask Aligner

Code: 
PHOTO2
Model: 
Karl Suss MA6/BA6
Location: 
Cleanroom
Primary Training Contact: 

The MA6 Mask Aligner is designed for high-resolution photolithography in a laboratory environment. It also offers Backside Align capability with automated image capture and computer display optics.  All operating controls are laid out in a simple, ergonomic design, making the operation of the aligner easy to learn and providing the versatility needed in specialized processes.  Optics are on screen, with no eyepiece.

The MA6 is equipped with a 350W lamp house containing a  350W mercury short-arc lamp. Primary exposure wavelengths are 350-450nm.  The aligner can perform exposures in hard contact mode, soft contact mode, proximity mode, and vacuum contact mode. Line/space resolution of <1.0 microns and alignment accuracies of 0.25 microns can be obtained with the MA6  under optimum conditions.

 

The MA6 is also equipped with a constant intensity controller (CIS) which regulates the lamp power to deliver constant intensity exposures.

The MA6 is capable of running samples ranging in size from 10mm to 150mm.  The mask holders can be used with masks ranging in size from 4" to 7" sq.  Minimum mask thickness is .09".

 

EYEPIECE SPACING INFORMATION:

The minium eyepiece spacing is 46mm, so if you wish to see 2 alignment marks simultaneously, those marks must be no closer than 46mm.

For maximum eyepiece spacing:
if using the small mask holder, the maximum is 76mm (the diameter of the circular opening in the mask holder) if using the large mask holder, the maximum is 143mm (this is the absolute maximum eyepiece spacing)

If using back-side alignment, then your marks should be between 22mm - 48mm apart OR between 56mm- 70mm apart (these constraints are set by the geometry of the glass vacuum platen)

NOTE: all the maximum spacings and bask-side alignment spacings assume your marks are on the horizontal diameter line (the equator) of the
circular hole in the mask holder.   Also, these are the limits, so you
may add ~1mm 'cushion' when actually spacing the marks (e.g. use 75mm as the max for the small holder), this will allow some fine adjustments in the eyepiece spacing if needed.